Mathematical Model of Silicon Oxidation in Microelectronics

V. A. Bondarev

ENERGETIKA. Proceedings of CIS higher education institutions and power engineering associations
Izvestiâ vysših učebnyh zavedenij i ènergetičeskih obʺedinennij SNG. Ènergetika

ISSN 1029-7448 (Print)
ISSN 2414-0341 (Online)

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Bondarev V.A. Mathematical Model of Silicon Oxidation in Microelectronics. ENERGETIKA. Proceedings of CIS higher education institutions and power engineering associations. 2006;(2):68-73. (In Russ.)

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ISSN 1029-7448 (Print)
ISSN 2414-0341 (Online)

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ENERGETIKA. Proceedings of CIS higher education institutions and power engineering associations

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